Invention Grant
- Patent Title: Switch array
- Patent Title (中): 开关阵列
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Application No.: US11886856Application Date: 2006-03-20
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Publication No.: US07994443B2Publication Date: 2011-08-09
- Inventor: Masato Hayashi , Masami Yakabe , Tetsuya Hasebe , Muneo Harada , Katsuya Okumura
- Applicant: Masato Hayashi , Masami Yakabe , Tetsuya Hasebe , Muneo Harada , Katsuya Okumura
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Tokyo Electron Limited,Octec Inc.
- Current Assignee: Tokyo Electron Limited,Octec Inc.
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JP2005-082121 20050322
- International Application: PCT/JP2006/305517 WO 20060320
- International Announcement: WO2006/101067 WO 20060928
- Main IPC: H01H1/00
- IPC: H01H1/00 ; H01H9/00

Abstract:
A first wiring layer 16 is disposed on an insulating film 14 on the lower surface of an upper substrate 15, while a second wiring layer 13three-dimensionally crossing the first wiring layer 16 is provided on the insulating film 12 on a lower substrate 11. A cantilever 17 has one end connected to the first wiring layer 16 and the other end opposed to the second wiring layer 13 with a space therebetween. A thermoplastic sheet 19 is arranged on the upper substrate 15 so as to cover the through-hole 18. The thermoplastic sheet 19 is pressed by a heated pin 20 against the cantilever 17 and deformed so as to maintain the connection between the cantilever 17and the second wiring layer 13, and therefore close the switch 10.
Public/Granted literature
- US20090045039A1 Switch Array Public/Granted day:2009-02-19
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