Invention Grant
US07994450B2 Debris minimization and improved spatial resolution in pulsed laser ablation of materials
有权
碎片最小化和改善材料脉冲激光烧蚀中的空间分辨率
- Patent Title: Debris minimization and improved spatial resolution in pulsed laser ablation of materials
- Patent Title (中): 碎片最小化和改善材料脉冲激光烧蚀中的空间分辨率
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Application No.: US10041328Application Date: 2002-01-07
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Publication No.: US07994450B2Publication Date: 2011-08-09
- Inventor: Richard A. Haight , Peter P. Longo , Alfred Wagner
- Applicant: Richard A. Haight , Peter P. Longo , Alfred Wagner
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Thomas A. Beck; Daniel P. Morris
- Main IPC: B23K26/00
- IPC: B23K26/00
Abstract:
A method and an apparatus of minimizing the deposition of debris onto a sample being ablated. The method comprising the steps of: 1) reducing a laser pulse energy to approximately a threshold level for ablation; and 2) ablating a region of the sample using a multitude of laser pulses, each pulse being sufficiently separated in time to reduce a concentration of ablation products in a gas phase. An apparatus for ablating a region of a sample with a laser beam. The apparatus comprises: 1) a source providing a pulsed laser beam of a certain energy, the source focusing the laser beam on the sample to ablate a region of the sample; and 2) a device for providing a flowing fluid over the region being ablated to remove the ablation products.
Public/Granted literature
- US20030127441A1 Debris minimization and improved spatial resolution in pulsed laser ablation of materials Public/Granted day:2003-07-10
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