Invention Grant
- Patent Title: Laser beam processing machine
- Patent Title (中): 激光束加工机
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Application No.: US11290988Application Date: 2005-12-01
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Publication No.: US07994451B2Publication Date: 2011-08-09
- Inventor: Koichi Shigematsu , Seiji Miura
- Applicant: Koichi Shigematsu , Seiji Miura
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2004-354558 20041207
- Main IPC: H01L21/46
- IPC: H01L21/46 ; H01L21/02
Abstract:
A laser beam processing machine comprising a chuck table for holding a workpiece, a laser beam application means for applying a pulse laser beam to the workpiece held on the chuck table, and a processing-feed means for processing-feeding the chuck table and the laser beam application means relative to each other, wherein the machine further comprises a feed amount detection means for detecting the processing-feed amount of the chuck table and a control means for controlling the laser beam application means based on a detection signal from the feed amount detection means, and the control means outputs an application signal to the laser beam application means for each predetermined processing-feed amount based on a signal from the feed amount detection means.
Public/Granted literature
- US20060119691A1 Laser beam processing machine Public/Granted day:2006-06-08
Information query
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