Invention Grant
- Patent Title: Phase change memory devices employing cell diodes and methods of fabricating the same
- Patent Title (中): 使用单元二极管的相变存储器件及其制造方法
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Application No.: US12196137Application Date: 2008-08-21
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Publication No.: US07994493B2Publication Date: 2011-08-09
- Inventor: Woo-Yeong Cho , Du-Eung Kim , Yun-Seung Shin , Hyun-Geun Byun , Sang-Beom Kang , Beak-Hyung Cho , Choong-Keun Kwak
- Applicant: Woo-Yeong Cho , Du-Eung Kim , Yun-Seung Shin , Hyun-Geun Byun , Sang-Beom Kang , Beak-Hyung Cho , Choong-Keun Kwak
- Applicant Address: KR Maetan-dong, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Maetan-dong, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Consulting, PLLC
- Priority: KR10-2005-0015564 20050224
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L47/00

Abstract:
Phase change memory devices may include a semiconductor substrate of a first conductivity type and a plurality of parallel word lines disposed on the semiconductor substrate. The word lines may have a second conductivity type different from the first conductivity type and substantially flat top surfaces. First and second semiconductor patterns may be sequentially stacked on each word line, and an insulating layer may be provided to fill gap regions between the word lines, gap regions between the first semiconductor patterns and gap regions between the second semiconductor patterns. A plurality of phase change material patterns may be two-dimensionally arrayed on the insulating layer and electrically connected to the second semiconductor patterns.
Public/Granted literature
- US20080303016A1 PHASE CHANGE MEMORY DEVICES EMPLOYING CELL DIODES AND METHODS OF FABRICATING THE SAME Public/Granted day:2008-12-11
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