Invention Grant
US07994503B2 Cu alloy wiring film, TFT element for flat-panel display using the Cu alloy wiring film, and Cu alloy sputtering target for depositing the Cu alloy wiring film
有权
Cu合金布线膜,使用Cu合金布线膜的平板显示用TFT元件和Cu合金布线膜的Cu合金溅射靶
- Patent Title: Cu alloy wiring film, TFT element for flat-panel display using the Cu alloy wiring film, and Cu alloy sputtering target for depositing the Cu alloy wiring film
- Patent Title (中): Cu合金布线膜,使用Cu合金布线膜的平板显示用TFT元件和Cu合金布线膜的Cu合金溅射靶
-
Application No.: US12517362Application Date: 2007-12-04
-
Publication No.: US07994503B2Publication Date: 2011-08-09
- Inventor: Aya Hino , Katsufumi Tomihisa , Hiroshi Gotou , Takashi Onishi
- Applicant: Aya Hino , Katsufumi Tomihisa , Hiroshi Gotou , Takashi Onishi
- Applicant Address: JP Kobe-shi
- Assignee: Kobe Steel, Ltd.
- Current Assignee: Kobe Steel, Ltd.
- Current Assignee Address: JP Kobe-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-327451 20061204
- International Application: PCT/JP2007/073419 WO 20071204
- International Announcement: WO2008/069214 WO 20080612
- Main IPC: H01L29/04
- IPC: H01L29/04

Abstract:
An object of the present invention is to provide: a Cu alloy wiring film that makes it possible to use Cu having a low electrical resistivity as a wiring material, exhibit a high adhesiveness to a glass substrate, and avoid the danger of peel off from the glass substrate; a TFT element for a flat-panel display produced with the Cu alloy wiring film; and a Cu alloy sputtering target used for the deposition of the Cu alloy wiring film. The present invention is a wiring film 2 composing a TFT element 1 for a flat-panel display and a sputtering target used for the deposition of the film and the material comprises Cu as the main component and at least one element selected from the group consisting of Pt, Ir, Pd, and Sm by 0.01 to 0.5 atomic percent in total. The wiring film 2 is layered on a glass substrate 3 and further a transparent conductive film 5 is layered thereon while an insulating film 4 is interposed in between.
Public/Granted literature
Information query
IPC分类: