Invention Grant
- Patent Title: Semiconductor memory device having amorphous contact plug
- Patent Title (中): 具有非晶接触插头的半导体存储器件
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Application No.: US11677156Application Date: 2007-02-21
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Publication No.: US07994556B2Publication Date: 2011-08-09
- Inventor: Takeshi Kokubun
- Applicant: Takeshi Kokubun
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2006-044861 20060222
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L27/108 ; H01L29/94

Abstract:
A semiconductor memory device includes: a semiconductor substrate; a field effect transistor formed on the semiconductor substrate; an interlayer dielectric layer formed on the field effect transistor; a contact plug connected to the field effect transistor through the interlayer dielectric layer; and a ferroelectric capacitor disposed on the interlayer dielectric layer and connected to the contact plug, wherein a contact surface between a lower electrode of the ferroelectric capacitor and the contact plug is smaller than a contact plug surface of the contact plug.
Public/Granted literature
- US20070194361A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2007-08-23
Information query
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