Invention Grant
US07994585B2 Semiconductor device and method for manufacturing the same 有权
半导体装置及其制造方法

  • Patent Title: Semiconductor device and method for manufacturing the same
  • Patent Title (中): 半导体装置及其制造方法
  • Application No.: US12318861
    Application Date: 2009-01-09
  • Publication No.: US07994585B2
    Publication Date: 2011-08-09
  • Inventor: Isamu Nishimura
  • Applicant: Isamu Nishimura
  • Applicant Address: JP Kyoto
  • Assignee: ROHM Co., Ltd.
  • Current Assignee: ROHM Co., Ltd.
  • Current Assignee Address: JP Kyoto
  • Agency: Rabin & Berdo, PC
  • Priority: JP2008-004606 20080111
  • Main IPC: H01L21/70
  • IPC: H01L21/70
Semiconductor device and method for manufacturing the same
Abstract:
A semiconductor device according to the present invention includes: a semiconductor layer; an element separating portion, formed in a top layer portion of the semiconductor layer and separating, in the semiconductor layer, a first element forming region for forming a first conductive type MOSFET and a second element forming region for forming a second conductive type MOSFET; a first gate insulating film, selectively formed on a top surface of the semiconductor layer in the first element forming region; a first gate electrode, formed on the first gate insulating film; a first sidewall, formed at a periphery of the first gate insulating film and the first gate electrode; a second gate insulating film, selectively formed on a top surface of the semiconductor layer in the second element forming region; a second gate electrode, formed on the second gate insulating film; and a second sidewall, formed at a periphery of the second gate insulating film and the second gate electrode. The first sidewall includes: a base, contacting the top surface of the semiconductor layer; and a main body, formed on the base and protruding laterally beyond a peripheral edge of the base.
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