Invention Grant
- Patent Title: Semiconductor device and manufacturing method of the same
- Patent Title (中): 半导体器件及其制造方法相同
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Application No.: US12411016Application Date: 2009-03-25
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Publication No.: US07994586B2Publication Date: 2011-08-09
- Inventor: Masashi Shima
- Applicant: Masashi Shima
- Applicant Address: JP Yokohama
- Assignee: Fujitsu Semiconductor Limited
- Current Assignee: Fujitsu Semiconductor Limited
- Current Assignee Address: JP Yokohama
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8238

Abstract:
In a p-type MOS transistor, a gate electrode is partially removed by a predetermined wet etching, so that an upper portion of the gate electrode is formed to be lower than an upper portion of a sidewall insulation film. As a result of such a constitution, in spite of formation of a tensile stress (TSEL) film leading to deterioration of characteristics of a p-type MOS transistor by nature, stresses applied from the TESL film to the gate electrode and the sidewall insulation film are dispersed as indicated by broken arrows in the drawing, and consequently, a compressive stress is applied to a channel region, so that a compressive strain is introduced. As stated above, in the p-type MOS transistor, in spite of formation of the TESL film, in reality, a strain to improve characteristics of the p-type MOS transistor is given to the channel region.
Public/Granted literature
- US20090179278A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2009-07-16
Information query
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