Invention Grant
US07994588B2 Inverted nonvolatile memory device, stack module, and method of fabricating the same
失效
反相非易失性存储器件,堆叠模块及其制造方法
- Patent Title: Inverted nonvolatile memory device, stack module, and method of fabricating the same
- Patent Title (中): 反相非易失性存储器件,堆叠模块及其制造方法
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Application No.: US12073398Application Date: 2008-03-05
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Publication No.: US07994588B2Publication Date: 2011-08-09
- Inventor: Huaxiang Yin , Young-soo Park , Sun-Il Kim
- Applicant: Huaxiang Yin , Young-soo Park , Sun-Il Kim
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2007-0087306 20070829
- Main IPC: H01L21/70
- IPC: H01L21/70

Abstract:
Example embodiments provide a nonvolatile memory device that may be integrated through stacking, a stack module, and a method of fabricating the nonvolatile memory device. In the nonvolatile memory device according to example embodiments, at least one bottom gate electrode may be formed on a substrate. At least one charge storage layer may be formed on the at least one bottom gate electrode, and at least one semiconductor channel layer may be formed on the at least one charge storage layer.
Public/Granted literature
- US20090057745A1 Inverted nonvolatile memory device, stack module, and method of fabricating the same Public/Granted day:2009-03-05
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