Invention Grant
- Patent Title: Device for the detection of electromagnetic waves and method for producing such a device
- Patent Title (中): 电磁波检测装置及其制造方法
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Application No.: US11993888Application Date: 2005-06-27
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Publication No.: US07994599B2Publication Date: 2011-08-09
- Inventor: Johannes Herrnsdorf , Georg Stute , Stefan Andreas Roessinger , Joachim Winterfeldt , Dirk Enderlein
- Applicant: Johannes Herrnsdorf , Georg Stute , Stefan Andreas Roessinger , Joachim Winterfeldt , Dirk Enderlein
- Applicant Address: DE Dortmund
- Assignee: MEAS Deutschland GmbH
- Current Assignee: MEAS Deutschland GmbH
- Current Assignee Address: DE Dortmund
- Agency: Howard IP Law Group, PC
- International Application: PCT/EP2005/006898 WO 20050627
- International Announcement: WO2007/000172 WO 20070104
- Main IPC: H01L29/56
- IPC: H01L29/56 ; H01L21/50

Abstract:
Device for the detection of electromagnetic waves with a first plate that contains a membrane and a detector structure fixed at least partially to the membrane, a second plate attached to the first plate, at least one contact point for surface mount technology on the first and/or second plate, whereby in a connection line between the detector structure and the contact point is at least partially led through the first and/or the second plate and that this connection line is at least partially prepared by film deposition and/or plating.
Public/Granted literature
- US20110024860A1 Device For The Detection Of Electromagnetic Waves And Method For Producing Such A Device Public/Granted day:2011-02-03
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