Invention Grant
US07994688B2 Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution
有权
具有厘米级行进范围和亚纳米定位分辨率的层状弱连杆机构的机械设计
- Patent Title: Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution
- Patent Title (中): 具有厘米级行进范围和亚纳米定位分辨率的层状弱连杆机构的机械设计
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Application No.: US12233228Application Date: 2008-09-18
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Publication No.: US07994688B2Publication Date: 2011-08-09
- Inventor: Deming Shu , Jorg M. Maser
- Applicant: Deming Shu , Jorg M. Maser
- Applicant Address: US IL Chicago
- Assignee: UChicago Argonne, LLC
- Current Assignee: UChicago Argonne, LLC
- Current Assignee Address: US IL Chicago
- Agent Joan Pennington
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
An enhanced mechanical design for laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution is provided. A multiple parallelogram weak-link structure includes a predefined pattern of a plurality of perpendicularly arranged groups of connecting links, each link having at least one pair of weak-link connections. Each of the plurality of perpendicularly arranged groups includes a terminal for mounting to a fixed base. The multiple parallelogram weak-link structure includes a moving part for mounting on a carriage, providing precisely controlled movement with stability in one direction. A two-dimensional (2D) ultra-precision scanning stages assembly for x-ray nanoprobe applications includes multiple redundantly constrained weak-link structures, a vertical ultra-precision positioning stage, and a horizontal ultra-precision positioning stage.
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