Invention Grant
US07994794B2 Methods for measuring a set of electrical characteristics in a plasma
有权
用于测量等离子体中的一组电特性的方法
- Patent Title: Methods for measuring a set of electrical characteristics in a plasma
- Patent Title (中): 用于测量等离子体中的一组电特性的方法
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Application No.: US12786405Application Date: 2010-05-24
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Publication No.: US07994794B2Publication Date: 2011-08-09
- Inventor: Christopher Kimball , Eric Hudson , Douglas Keil , Alexei Marakhtanov
- Applicant: Christopher Kimball , Eric Hudson , Douglas Keil , Alexei Marakhtanov
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: IP Strategy Group, P.C.
- Main IPC: G01N27/26
- IPC: G01N27/26 ; H05B31/26

Abstract:
Methods using a probe apparatus configured to measure a set of electrical characteristics in a plasma include providing a chamber wall including at least a set of plasma chamber surfaces configured to be exposed to a plasma, the plasma having a set of electrical characteristics. The method includes installing a collection disk structure configured to be exposed to the plasma, wherein the collection disk structure having at least a body disposed within the chamber wall and a collection disk structure surface that is either coplanar or recessed with at least one of the set of plasma chamber surfaces and providing a conductive path configured to transmit the set of electrical characteristics from the collection disk structure to a set of transducers. The method may include coupling a thermal grounding element with the conductive path for providing thermal grounding to at least the conductive path and may alternatively or additionally include disposing an insulation barrier configured to substantially electrically separate at least one of the collection disk and the conductive path.
Public/Granted literature
- US20100229372A1 METHODS FOR MEASURING A SET OF ELECTRICAL CHARACTERISTICS IN A PLASMA Public/Granted day:2010-09-16
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