Invention Grant
- Patent Title: Acoustic wave device and high-frequency filter using the same
- Patent Title (中): 声波装置和高频滤波器使用相同
-
Application No.: US12473755Application Date: 2009-05-28
-
Publication No.: US07994878B2Publication Date: 2011-08-09
- Inventor: Atsushi Isobe , Kengo Asai
- Applicant: Atsushi Isobe , Kengo Asai
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2008-142961 20080530; JP2009-071611 20090324
- Main IPC: H03H9/00
- IPC: H03H9/00 ; H03H9/15

Abstract:
Boundary acoustic wave devices are both compact and possess excellent temperature stability. Yet these devices have the drawback that the Q value cannot be raised, and a high cost thin-film technology is required. This invention provides a boundary acoustic wave device possessing excellent Q value along with a low cost. A boundary acoustic wave device including a film whose main ingredient is aluminum at a thickness hm, and a shorting reflector (thickness hr) and a IDT with an electrode finger period of lambda, are patterned onto the surface of a theta YX-LN single crystalline piezoelectric substrate; and a silicon oxide film with a thickness h1 and an aluminum nitride film 6 with a thickness h2 are formed on that comb electrode and reflector, wherein: 2.5≦hr/λ≦8.5% is obtained.
Public/Granted literature
- US20090295508A1 ACOUSTIC WAVE DEVICE AND HIGH-FREQUENCY FILTER USING THE SAME Public/Granted day:2009-12-03
Information query