Invention Grant
- Patent Title: Optical displacement measuring device
- Patent Title (中): 光学位移测量装置
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Application No.: US12382314Application Date: 2009-03-13
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Publication No.: US07995212B2Publication Date: 2011-08-09
- Inventor: Hideaki Tamiya , Akihiro Kuroda
- Applicant: Hideaki Tamiya , Akihiro Kuroda
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Rader, Fishman & Grauer PLLC
- Priority: JP2008-105047 20080414
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B9/02 ; G01D5/34

Abstract:
An optical displacement measuring device includes a diffraction grating, a reflecting optical system configured to irradiate two one-time diffracted beams diffracted at the diffraction grating on the diffraction grating again, and the reflecting optical system includes a first imaging element, a second imaging element, a first reflector, and a second reflector, wherein the focal length of the first imaging element and the focal length of the second imaging element are the same, the diffraction grating and first reflector are disposed around the focal position of the first imaging element, and the diffraction grating and second reflector are disposed around the focal position of the second imaging element, thereby suppressing influence of displacement of the diffraction grating as to other than a direction where a movement position is detected.
Public/Granted literature
- US20090257066A1 Optical displacement measuring device Public/Granted day:2009-10-15
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