Invention Grant
- Patent Title: Device consisting of at least one optical element
- Patent Title (中): 装置由至少一个光学元件组成
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Application No.: US12555269Application Date: 2009-09-08
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Publication No.: US07995884B2Publication Date: 2011-08-09
- Inventor: Yim-Bun Patrick Kwan , Michael Muehlbeyer , Johannes Lippert
- Applicant: Yim-Bun Patrick Kwan , Michael Muehlbeyer , Johannes Lippert
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G02B6/26
- IPC: G02B6/26
Abstract:
An optical assembly comprises at least one optical element movable in at least two degrees of freedom and at least one actuator for adjusting the least one optical element; at least one sensor for sensing the position of the at least one element in at least two degrees of freedom and is characterised in that the at least one sensor is located at least substantially diagonally opposite to the least one actuator.
Public/Granted literature
- US20090324174A1 DEVICE CONSISTING OF AT LEAST ONE OPTICAL ELEMENT Public/Granted day:2009-12-31
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