Invention Grant
US08004162B2 Piezoelectric device, angular velocity sensor, electronic apparatus, and production method of a piezoelectric device 有权
压电元件,角速度传感器,电子设备以及压电元件的制造方法

  • Patent Title: Piezoelectric device, angular velocity sensor, electronic apparatus, and production method of a piezoelectric device
  • Patent Title (中): 压电元件,角速度传感器,电子设备以及压电元件的制造方法
  • Application No.: US12545524
    Application Date: 2009-08-21
  • Publication No.: US08004162B2
    Publication Date: 2011-08-23
  • Inventor: Nobuyuki KoikeTakashi Tamura
  • Applicant: Nobuyuki KoikeTakashi Tamura
  • Applicant Address: JP Tokyo
  • Assignee: Sony Corporation
  • Current Assignee: Sony Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: K&L Gates LLP
  • Priority: JP2008-215367 20080825
  • Main IPC: H01L41/08
  • IPC: H01L41/08
Piezoelectric device, angular velocity sensor, electronic apparatus, and production method of a piezoelectric device
Abstract:
A piezoelectric device is provided and includes a substrate, a first electrode film, a piezoelectric film, and a second electrode film. The first electrode film is formed on the substrate. The piezoelectric film is represented by Pb1+X(ZrYTi1−Y)O3+X(0≦X≦0.3, 0≦Y≦0.55) and a peak intensity of a pyrochlore phase measured by an X-ray diffraction method is 10% or less with respect to a sum of peak intensities of a (100) plane orientation, a (001) plane orientation, a (110) plane orientation, a (101) plane orientation, and a (111) plane orientation of a perovskite phase, the piezoelectric film being formed on the first electrode film with a film thickness of 400 nm or more and 1,000 nm or less. The second electrode film is laminated on the piezoelectric film.
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