Invention Grant
- Patent Title: Piezoelectric device, angular velocity sensor, electronic apparatus, and production method of a piezoelectric device
- Patent Title (中): 压电元件,角速度传感器,电子设备以及压电元件的制造方法
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Application No.: US12545524Application Date: 2009-08-21
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Publication No.: US08004162B2Publication Date: 2011-08-23
- Inventor: Nobuyuki Koike , Takashi Tamura
- Applicant: Nobuyuki Koike , Takashi Tamura
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: K&L Gates LLP
- Priority: JP2008-215367 20080825
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
A piezoelectric device is provided and includes a substrate, a first electrode film, a piezoelectric film, and a second electrode film. The first electrode film is formed on the substrate. The piezoelectric film is represented by Pb1+X(ZrYTi1−Y)O3+X(0≦X≦0.3, 0≦Y≦0.55) and a peak intensity of a pyrochlore phase measured by an X-ray diffraction method is 10% or less with respect to a sum of peak intensities of a (100) plane orientation, a (001) plane orientation, a (110) plane orientation, a (101) plane orientation, and a (111) plane orientation of a perovskite phase, the piezoelectric film being formed on the first electrode film with a film thickness of 400 nm or more and 1,000 nm or less. The second electrode film is laminated on the piezoelectric film.
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