Invention Grant
US08006564B1 Pressure sensor with integrated thermal stabilization and method of using
有权
具有集成热稳定性的压力传感器和使用方法
- Patent Title: Pressure sensor with integrated thermal stabilization and method of using
- Patent Title (中): 具有集成热稳定性的压力传感器和使用方法
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Application No.: US12539358Application Date: 2009-08-11
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Publication No.: US08006564B1Publication Date: 2011-08-30
- Inventor: Greg S. Shaw , Troy Prince , Joseph Snyder , Michael C. Willett , Frederick J. Lisy
- Applicant: Greg S. Shaw , Troy Prince , Joseph Snyder , Michael C. Willett , Frederick J. Lisy
- Applicant Address: US OH Cleveland
- Assignee: Orbital Research Inc.
- Current Assignee: Orbital Research Inc.
- Current Assignee Address: US OH Cleveland
- Agent Brian M. Kolkowski; Robert K. Schmidt
- Main IPC: G01L19/04
- IPC: G01L19/04

Abstract:
The present invention relates to a method of determining both pressures and temperatures in a high temperature environment. The present invention also relates to a method of determining temperatures about a pressure-sensing element using a bi-functional heater. In addition, the present invention preferably relates to a pressure sensor with the pressure-sensing element and a heating element both integrated into the sensor's packaging, preferably onto the diaphragm of the pressure sensor, and particularly to such a pressure sensor capable of operating at high or elevated temperatures, and even more particularly to such a pressure sensor wherein the heating element is capable of both heating, at least in part, the pressure-sensing element and monitoring the temperature of the application area. Preferably, the pressure-sensing element is formed from shape memory alloy (SMA) materials that can be used at high or elevated temperatures as a pressure sensor with high sensitivity.
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