A superheated stream grill includes a heating tray to serve as a heat source for heating and cooking the food materials. In addition, it also provides a function of heating food materials by using a superheated stream. The grill has a heating system for generating the superheated stream. The heating system atomizes the water molecules to form mist by means of the supersonic vibration, and then the mist is heated and converted into the superheated stream. The superheated stream is injected and sprayed onto the food materials. In this way, the mouth feeling of the food materials after cooking is much better and the time for cooking is also reduced.