Invention Grant
US08007169B2 Sensor 有权
传感器

Sensor
Abstract:
A sensor, in particular a thermal sensor and/or gas sensor, encompassing an electrical sensor component having an electrical property whose value changes in temperature-dependent fashion, wherein the temperature-dependent electrical property is a resistance or an impedance. Thermal and electrical decoupling of the active structure from the substrate is accomplished by way of porous silicon and/or a cavity manufactured by electropolishing.
Public/Granted literature
Information query
Patent Agency Ranking
0/0