Invention Grant
- Patent Title: Sensor
- Patent Title (中): 传感器
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Application No.: US11921669Application Date: 2006-06-13
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Publication No.: US08007169B2Publication Date: 2011-08-30
- Inventor: Bernhard Opitz , Ando Feyh , Daniel Herrmann , Oliver Wolst
- Applicant: Bernhard Opitz , Ando Feyh , Daniel Herrmann , Oliver Wolst
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102005031604 20050706
- International Application: PCT/EP2006/063152 WO 20060613
- International Announcement: WO2007/054380 WO 20070518
- Main IPC: G01K7/00
- IPC: G01K7/00

Abstract:
A sensor, in particular a thermal sensor and/or gas sensor, encompassing an electrical sensor component having an electrical property whose value changes in temperature-dependent fashion, wherein the temperature-dependent electrical property is a resistance or an impedance. Thermal and electrical decoupling of the active structure from the substrate is accomplished by way of porous silicon and/or a cavity manufactured by electropolishing.
Public/Granted literature
- US20090129440A1 Sensor Public/Granted day:2009-05-21
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