Invention Grant
US08007218B2 Unit and method for transferring substrates and apparatus and method for treating substrates with the unit 有权
用于转移基材的装置和方法以及用该单元处理基材的方法和方法

  • Patent Title: Unit and method for transferring substrates and apparatus and method for treating substrates with the unit
  • Patent Title (中): 用于转移基材的装置和方法以及用该单元处理基材的方法和方法
  • Application No.: US12458098
    Application Date: 2009-06-30
  • Publication No.: US08007218B2
    Publication Date: 2011-08-30
  • Inventor: Dong-Seok ParkSang-Ho Seol
  • Applicant: Dong-Seok ParkSang-Ho Seol
  • Applicant Address: KR Gyeonggi-do
  • Assignee: PSK Inc.
  • Current Assignee: PSK Inc.
  • Current Assignee Address: KR Gyeonggi-do
  • Agency: Harness, Dickey & Pierce, P.L.C.
  • Priority: KR10-2007-0042599 20070502
  • Main IPC: H01L21/677
  • IPC: H01L21/677
Unit and method for transferring substrates and apparatus and method for treating substrates with the unit
Abstract:
The present invention is related to a method for transferring substrates. The method comprise simultaneously transferring two substrates, by means of a transfer unit, between first support plates disposed to be vertically spaced apart from each other and second support plates arranged abreast in a lateral direction. The transfer unit comprises a top blade and a bottom blade converted to a folded state where they are vertically disposed to face each other and an unfolded state where they rotate at a preset angle in opposite directions. The transfer unit place/take a substrate on/out of the first support plates under the folded state and place/take a substrate on/out of the second support plates under the unfolded state.
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