Invention Grant
- Patent Title: Inclined carrier transferring apparatus
- Patent Title (中): 倾斜载体传送装置
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Application No.: US11454730Application Date: 2006-06-16
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Publication No.: US08007644B2Publication Date: 2011-08-30
- Inventor: Sung Eun Kim , Tae Hyun Lim , Kwang Jong Yoo , Byung Han Yun , Yang Sik Moon
- Applicant: Sung Eun Kim , Tae Hyun Lim , Kwang Jong Yoo , Byung Han Yun , Yang Sik Moon
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Brinks Hofer Gilson & Lione
- Priority: KR10-2005-0053987 20050622
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C16/00
Abstract:
An inclined carrier transferring apparatus for use inline sputtering equipment. The inclined carrier transferring apparatus includes rollers and a guiding portion. The rollers transfer and support the bottom of a carrier. The guiding portion is installed diagonally with respect to the rollers, to support the top of the carrier in a non-contact manner.
Public/Granted literature
- US20060289306A1 Inclined carrier transferring apparatus Public/Granted day:2006-12-28
Information query
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