Invention Grant
US08007989B1 Method and solution for forming a patterned ferroelectric layer on a substrate
失效
在基板上形成图案化铁电层的方法和解决方案
- Patent Title: Method and solution for forming a patterned ferroelectric layer on a substrate
- Patent Title (中): 在基板上形成图案化铁电层的方法和解决方案
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Application No.: US12081143Application Date: 2008-04-11
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Publication No.: US08007989B1Publication Date: 2011-08-30
- Inventor: Thomas Kirk Dougherty
- Applicant: Thomas Kirk Dougherty
- Applicant Address: US DC Washington
- Assignee: The United States of America as represented by the Secretary of the Navy
- Current Assignee: The United States of America as represented by the Secretary of the Navy
- Current Assignee Address: US DC Washington
- Agent John Tarlano
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F1/00

Abstract:
A method for forming a patterned ferroelectric layer, having ferroelectric electronic properties, on a substrate. A composite layer, made of ferroelectric layer producing metal acrylate compounds, a photoinitiator compound and an acrylate crosslinking compound is formed on the substrate. A photomask is formed on the composite layer. Unmasked areas of the composite layer are irradiated with ultraviolet light. A solvent removes non-irradiated areas of the composite layer from the substrate. The patterned composite layer is heated in an oxygen atmosphere to cause a chemical reaction among the ferroelectric layer producing metal acrylate compounds and oxygen, a patterned ferroelectric layer being formed on the substrate.
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