Invention Grant
- Patent Title: Self-aligned Schottky diode
- Patent Title (中): 自对准肖特基二极管
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Application No.: US12538213Application Date: 2009-08-10
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Publication No.: US08008142B2Publication Date: 2011-08-30
- Inventor: Alan B. Botula , Alvin J. Joseph , Alan D. Norris , Robert M. Rassel , Yun Shi
- Applicant: Alan B. Botula , Alvin J. Joseph , Alan D. Norris , Robert M. Rassel , Yun Shi
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Anthony J. Canale
- Main IPC: H01L21/338
- IPC: H01L21/338

Abstract:
A Schottky barrier diode comprises a doped guard ring having a doping of a second conductivity type in a semiconductor-on-insulator (SOI) substrate. The Schottky barrier diode further comprises a first-conductivity-type-doped semiconductor region having a doping of a first conductivity type, which is the opposite of the second conductivity type, on one side of a dummy gate electrode and a Schottky barrier structure surrounded by the doped guard ring on the other side. A Schottky barrier region may be laterally surrounded by the dummy gate electrode and the doped guard ring. The doped guard ring includes an unmetallized portion of a gate-side second-conductivity-type-doped semiconductor region having a doping of a second conductivity type. A Schottky barrier region may be laterally surrounded by a doped guard ring including a gate-side doped semiconductor region and a STI-side doped semiconductor region. Design structures for the inventive Schottky barrier diode are also provided.
Public/Granted literature
- US20100230751A1 SELF-ALIGNED SCHOTTKY DIODE Public/Granted day:2010-09-16
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