Invention Grant
- Patent Title: Substrate, method of polishing the same, and polishing apparatus
- Patent Title (中): 基板,抛光方法和抛光装置
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Application No.: US11988213Application Date: 2006-07-07
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Publication No.: US08008203B2Publication Date: 2011-08-30
- Inventor: Junji Watanabe
- Applicant: Junji Watanabe
- Applicant Address: JP Kumamoto
- Assignee: National Universtiy Corporation Kumamoto University
- Current Assignee: National Universtiy Corporation Kumamoto University
- Current Assignee Address: JP Kumamoto
- Agency: Oliff & Berridge, PLC
- Priority: JP2005-198640 20050707
- International Application: PCT/JP2006/313601 WO 20060707
- International Announcement: WO2007/007683 WO 20070118
- Main IPC: H01L21/302
- IPC: H01L21/302

Abstract:
A polishing method and a polishing apparatus capable of polishing a surface of a substrate made of SiC or diamond extremely smoothly and efficiently without causing subsurface damage are provided. A polishing platen 1 can rotate around a rotating shaft 4, and is made of quartz having high transparency to ultraviolet radiation. A large number of grooves 11 are arranged on a front surface of the polishing platen 1 in a lattice form, and each of the grooves 11 is filled with solid photocatalytic particles 20 (CeO2). The polishing platen 1 is relatively rubbed against a to-be-polished surface 30A of a substrate 30 made of silicon carbide (SiC) or diamond (C) while pressing the polishing platen 1 to the to-be-polished surface 30A of the substrate 30 with a very high pressure, thereby the to-be-polished surface 30A is oxidized by the solid photocatalytic particles 20 to perform chemical polishing. The oxidation of the to-be-polished surface 30A is promoted by applying ultraviolet radiation from an ultraviolet source lamp 2, and polishing is promoted by heating by an infrared source lamp 3.
Public/Granted literature
- US20090050897A1 Substrate, method of polishing the same, and polishing apparatus Public/Granted day:2009-02-26
Information query
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