Invention Grant
- Patent Title: Arrangement for generating extreme ultraviolet radiation by means of an electrically operated gas discharge
- Patent Title (中): 通过电动气体放电产生极紫外辐射的装置
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Application No.: US11693207Application Date: 2007-03-29
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Publication No.: US08008595B2Publication Date: 2011-08-30
- Inventor: Guido Hergenhan , Christian Ziener
- Applicant: Guido Hergenhan , Christian Ziener
- Applicant Address: DE Jena
- Assignee: XTREME technologies GmbH
- Current Assignee: XTREME technologies GmbH
- Current Assignee Address: DE Jena
- Agency: Frommer Lawrence & Haug LLP
- Priority: DE102006015641 20060331
- Main IPC: B23K15/00
- IPC: B23K15/00 ; H05B31/26

Abstract:
An arrangement for generating extreme ultraviolet radiation by an electrically operated gas discharge which achieves an improvement in the adjustment of the layer thickness when applying a molten metal to the electrode surfaces and provides better protection against the uncontrolled spreading of molten metal into the environment that is associated with an increase in the rotational speed of the electrodes. It should be possible to increase the rotational speed to the extent that unconsumed discharge zones of the electrodes are always situated in the discharge area at repetition frequencies of several kilohertz. An edge area to be covered has at least one receiving area which extends circumferentially in a closed manner along the edge of the electrode on the electrode surface and which is constructed so as to be wetting for the molten metal and to which a liquid dispensing nozzle is directed for regenerative application of the molten metal.
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