Invention Grant
US08008664B2 Component comprising a thin-film transistor and CMOS-transistors and methods for production
有权
包括薄膜晶体管和CMOS晶体管的元件及其制造方法
- Patent Title: Component comprising a thin-film transistor and CMOS-transistors and methods for production
- Patent Title (中): 包括薄膜晶体管和CMOS晶体管的元件及其制造方法
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Application No.: US12375529Application Date: 2007-07-25
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Publication No.: US08008664B2Publication Date: 2011-08-30
- Inventor: Hubert Enichlmair
- Applicant: Hubert Enichlmair
- Applicant Address: AT Unterpremstätten
- Assignee: austriamicrosystms AG
- Current Assignee: austriamicrosystms AG
- Current Assignee Address: AT Unterpremstätten
- Agency: Cozen O'Connor
- Priority: DE102006035073 20060728
- International Application: PCT/EP2007/057675 WO 20070725
- International Announcement: WO2008/012332 WO 20080131
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
An electrical component, in the crystalline semiconductor body of which several CMOS transistors in high-voltage or low-voltage technology are formed. The individual CMOS transistors are separated from one another by insulation regions. On one insulation region, a thin-film transistor is formed, having a gate that is realized simultaneously with the gates of the CMOS transistors from the same polysilicon layer. The gate oxide of the thin-film transistor, just like a second polysilicon layer for source drain and body of the thin-film transistor, can be produced together with the structural elements already present in the CMOS process.
Public/Granted literature
- US20100032675A1 Component Comprising a Thin-Film Transistor and CMOS-Transistors and Methods for Production Public/Granted day:2010-02-11
Information query
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