Invention Grant
US08008712B2 Metallization and its use in, in particular, an IGBT or a diode
有权
金属化及其在特别是IGBT或二极管中的应用
- Patent Title: Metallization and its use in, in particular, an IGBT or a diode
- Patent Title (中): 金属化及其在特别是IGBT或二极管中的应用
-
Application No.: US11082192Application Date: 2005-03-16
-
Publication No.: US08008712B2Publication Date: 2011-08-30
- Inventor: Frank Hille , Hans-Joachim Schulze
- Applicant: Frank Hille , Hans-Joachim Schulze
- Applicant Address: DE Munich
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Munich
- Agency: Maginot, Moore & Beck
- Priority: DE102004012818 20040316
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
The invention relates to a metallization for an IGBT or a diode. In the case of this metallization, a copper layer (10, 12) having a layer thickness of approximately 50 μm is applied to the front side and/or rear side of a semiconductor body (1) directly or if need be via a diffusion barrier layer (13, 14). The layer (8, 12) has a specific heat capacity that is at least a factor of 2 higher than the specific heat capacity of the semiconductor body (1). It simultaneously serves for producing a field stop layer (5) by proton implantation through the layer (12) from the rear side and for masking a proton or helium implantation for the purpose of charge carrier lifetime reduction from the front side of the chip (1).
Public/Granted literature
- US20050215042A1 Metallization and its use in, in particular, an IGBT or a diode Public/Granted day:2005-09-29
Information query
IPC分类: