Invention Grant
- Patent Title: Integrated differential pressure sensor
- Patent Title (中): 集成差压传感器
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Application No.: US12826388Application Date: 2010-06-29
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Publication No.: US08008738B2Publication Date: 2011-08-30
- Inventor: Flavio Francesco Villa , Pietro Corona , Gabriele Barlocchi , Lorenzo Baldo
- Applicant: Flavio Francesco Villa , Pietro Corona , Gabriele Barlocchi , Lorenzo Baldo
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Agent Lisa K. Jorgenson; E. Russell Tarleton
- Priority: EP05425306 20050506
- Main IPC: H01L29/84
- IPC: H01L29/84 ; G01L9/00

Abstract:
An integrated differential pressure sensor includes, in a monolithic body of semiconductor material, a first face and a second face, a cavity extending at a distance from the first face and delimited therewith by a flexible membrane formed in part by epitaxial material from the monolithic body and in part by annealed epitaxial material from the monolithic body, an access passage in fluid communication with the cavity, and in the flexible membrane at least one transduction element configured so as to convert a deformation of the flexible membrane into electrical signals. The cavity is formed in a position set at a distance from the second face and is delimited at the second face with a portion of the monolithic body.
Public/Granted literature
- US20100269595A1 INTEGRATED DIFFERENTIAL PRESSURE SENSOR Public/Granted day:2010-10-28
Information query
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