Invention Grant
- Patent Title: Semiconductor memory device and method of fabricating the same
- Patent Title (中): 半导体存储器件及其制造方法
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Application No.: US12457500Application Date: 2009-06-12
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Publication No.: US08008742B2Publication Date: 2011-08-30
- Inventor: Hong-soo Kim , Su-in Baek , Seung-wook Choi
- Applicant: Hong-soo Kim , Su-in Baek , Seung-wook Choi
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2008-0055432 20080612
- Main IPC: H01L21/762
- IPC: H01L21/762

Abstract:
Provided are a semiconductor memory device whereby generation of dishing during planarization of a peripheral circuit region is suppressed, and a method of fabricating the semiconductor memory device. The semiconductor memory device includes a semiconductor substrate comprising a first active area in a memory cell region and a second active area in a peripheral circuit region; a plurality of first isolation films and a plurality of second isolation films protruding from a surface of the semiconductor substrate and defining the first active area and the second active area, respectively; and at least one polish stopper film formed within the second active area and protruding from the surface of the semiconductor substrate.
Public/Granted literature
- US20090309147A1 Semiconductor memory device and method of fabricating the same Public/Granted day:2009-12-17
Information query
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