Invention Grant
- Patent Title: Planar stage moving apparatus for machine
- Patent Title (中): 机台平台移动装置
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Application No.: US12198476Application Date: 2008-08-26
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Publication No.: US08008815B2Publication Date: 2011-08-30
- Inventor: Seung-Kook Ro , Jong-Kweon Park
- Applicant: Seung-Kook Ro , Jong-Kweon Park
- Applicant Address: KR Yuseong-gu
- Assignee: Korea Institute of Machinery & Materials
- Current Assignee: Korea Institute of Machinery & Materials
- Current Assignee Address: KR Yuseong-gu
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: KR10-2007-0088980 20070903
- Main IPC: H02K41/02
- IPC: H02K41/02 ; H02K7/08 ; B23Q1/62

Abstract:
A planar stage moving apparatus for a machine includes: first to fourth linear motors for applying, between a base, i.e. a fixed body and a table, i.e. a movable body, a movement force to the table, each linear motor including a stator core on which a coil is wound and which is fixed to the base and a mover core to which a permanent magnet is attached and which is fixed to the table; an air bearing unit provided between the base and the table to move the table under the influence of magnet fields when currents are applied to the coils of the linear motors; and a linear encoder installed on one side of the table to measure movement of the table.
Public/Granted literature
- US20090056594A1 PLANAR STAGE MOVING APPARATUS FOR MACHINE Public/Granted day:2009-03-05
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