Invention Grant
- Patent Title: Surface inspecting method and device
- Patent Title (中): 表面检查方法及装置
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Application No.: US12442879Application Date: 2007-12-04
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Publication No.: US08009286B2Publication Date: 2011-08-30
- Inventor: Hisashi Isozaki , Takehiro Takase , Takashi Kakinuma , Hiroyuki Maekawa , Fumio Koda , Michihiro Yamazaki
- Applicant: Hisashi Isozaki , Takehiro Takase , Takashi Kakinuma , Hiroyuki Maekawa , Fumio Koda , Michihiro Yamazaki
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Topcon
- Current Assignee: Kabushiki Kaisha Topcon
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP2007-055663 20070306
- International Application: PCT/JP2007/073744 WO 20071204
- International Announcement: WO2008/108041 WO 20080912
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
A light source section outputs optical flux having two types of wavelength, which are a short wavelength and a long wavelength, while the intensity is made variable. The output from the first light intensity detecting section in irradiating the optical flux having a short wavelength is compared with the output from the first light intensity detecting section in irradiating the optical flux having a long wavelength. A disappearance level near a point where the detected signal from the internal subject disappears is calculated. The first intensity of optical flux having a long wavelength is set to level higher than the disappearance level. Based on the output from the first light intensity detecting section obtained by the optical flux having a long wavelength of the first intensity, a subject inside the body to be detected is measured.
Public/Granted literature
- US20100007872A1 SURFACE INSPECTING METHOD AND DEVICE Public/Granted day:2010-01-14
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