Invention Grant
- Patent Title: Optical imaging device having at least one system diaphragm
- Patent Title (中): 具有至少一个系统隔膜的光学成像装置
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Application No.: US10566196Application Date: 2004-07-02
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Publication No.: US08009343B2Publication Date: 2011-08-30
- Inventor: Bernhard Gellrich , Thomas Bischoff , Hermann Bieg , Martin Huber , Francois Henzelin , Gerhard Szekely , Uy-Liem Nguyen , Martin E. Humphries
- Applicant: Bernhard Gellrich , Thomas Bischoff , Hermann Bieg , Martin Huber , Francois Henzelin , Gerhard Szekely , Uy-Liem Nguyen , Martin E. Humphries
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Wells St. John P.S.
- Priority: DE10335215 20030801
- International Application: PCT/EP2004/007186 WO 20040702
- International Announcement: WO2005/019878 WO 20050303
- Main IPC: G02B27/72
- IPC: G02B27/72
Abstract:
An optical imaging device (PL), in particular an objective for semiconductor lithography, is provided with at least one system diaphragm. The system diaphragm comprises a multiplicity of mobile plates, which are rotatably mounted. The plates have a spherical curvature.
Public/Granted literature
- US20090021820A1 Optical Imaging Device Having At Least One System Diaphragm Public/Granted day:2009-01-22
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