Invention Grant
US08009353B2 Comparison optical system 有权
比较光学系统

Comparison optical system
Abstract:
A comparison optical system (1) comprising several image-acquiring optical subsystems is disclosed. A bridge (3) mechanically and optically connects the optical subsystems to one another. Each of the image-acquiring optical subsystems possesses an XYZ stage (8a, 8b), movable in motorized fashion, on which a sample to be examined is placed. Also provided is a control unit which moves the XYZ stages (8a, 8b), movable in motorized fashion, synchronously in all three spatial directions. The synchronous motion of the XYZ stages (8a, 8b) can be switched on and off by the user.
Public/Granted literature
Information query
Patent Agency Ranking
0/0