Invention Grant
- Patent Title: Comparison optical system
- Patent Title (中): 比较光学系统
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Application No.: US12169754Application Date: 2008-07-09
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Publication No.: US08009353B2Publication Date: 2011-08-30
- Inventor: Manfred Gilbert
- Applicant: Manfred Gilbert
- Applicant Address: DE Wetzlar
- Assignee: Leica Microsystems CMS GmbH
- Current Assignee: Leica Microsystems CMS GmbH
- Current Assignee Address: DE Wetzlar
- Agency: Houston Eliseeva, LLP
- Priority: EP02102514 20021031
- Main IPC: G02B21/26
- IPC: G02B21/26

Abstract:
A comparison optical system (1) comprising several image-acquiring optical subsystems is disclosed. A bridge (3) mechanically and optically connects the optical subsystems to one another. Each of the image-acquiring optical subsystems possesses an XYZ stage (8a, 8b), movable in motorized fashion, on which a sample to be examined is placed. Also provided is a control unit which moves the XYZ stages (8a, 8b), movable in motorized fashion, synchronously in all three spatial directions. The synchronous motion of the XYZ stages (8a, 8b) can be switched on and off by the user.
Public/Granted literature
- US20090180177A1 Comparison Optical System Public/Granted day:2009-07-16
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