Invention Grant
US08011226B2 Leakage detection method using micromachined-thermal-convection accelerometer
有权
使用微加工热对流加速度计的泄漏检测方法
- Patent Title: Leakage detection method using micromachined-thermal-convection accelerometer
- Patent Title (中): 使用微加工热对流加速度计的泄漏检测方法
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Application No.: US12229646Application Date: 2008-08-26
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Publication No.: US08011226B2Publication Date: 2011-09-06
- Inventor: Yaping Hua , Zongya Li , Hanwu Xiao
- Applicant: Yaping Hua , Zongya Li , Hanwu Xiao
- Applicant Address: US MA Andover
- Assignee: Memsic, Inc.
- Current Assignee: Memsic, Inc.
- Current Assignee Address: US MA Andover
- Agency: Weingarten, Schurgin, Gagnebin & Lebovici LLP
- Main IPC: G01M3/40
- IPC: G01M3/40
Abstract:
A method and device for identifying leaks in or a leakage rate of an integrated circuit package. The method and device include integrating a micromachined-thermal-convection accelerometer in the integrated circuit package and evaluating the initial and subsequent sensitivities of the accelerometer. A change in sensitivity with time provides indicia of a leak and a measure of leakage rate.
Public/Granted literature
- US20100050747A1 Leakage detection method using micromachined-thermal-convection accelerometer Public/Granted day:2010-03-04
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