Invention Grant
- Patent Title: Microsystem, and more particularly a microgyrometer, includes at least two mechanically coupled oscillating masses
- Patent Title (中): 微系统,更具体地,微测量仪包括至少两个机械耦合振荡块
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Application No.: US12086495Application Date: 2006-12-22
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Publication No.: US08011244B2Publication Date: 2011-09-06
- Inventor: Bernard Diem
- Applicant: Bernard Diem
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Oliff & Berridge, PLC
- Priority: FR0513215 20051223
- International Application: PCT/FR2006/002846 WO 20061222
- International Announcement: WO2007/077353 WO 20070712
- Main IPC: G01P9/04
- IPC: G01P9/04 ; G01C19/56

Abstract:
A microsystem, and more particularly a microgyrometer, includes at least two mechanically coupled oscillating masses.The microsystem is achieved in a flat substrate. The oscillating masses are connected to the substrate by suspension springs. The oscillating masses are coupled together by a rigid coupling bar so as to produce an anti-phase movement of the oscillating masses when driven by an excitation device in a predefined excitation direction. The coupling bar is connected to intermediate zones of the corresponding suspension springs. The suspension springs are arranged on opposite sides of the oscillating masses. An intermediate zone is arranged between a first end of a suspension spring, which is fixed to the corresponding oscillating mass, and a second end of the suspension spring, which is fixed to the substrate by a corresponding anchoring point.
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