Invention Grant
US08011317B2 Advanced mixing system for integrated tool having site-isolated reactors
有权
具有现场隔离反应堆的综合工具的先进混合系统
- Patent Title: Advanced mixing system for integrated tool having site-isolated reactors
- Patent Title (中): 具有现场隔离反应堆的综合工具的先进混合系统
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Application No.: US11647881Application Date: 2006-12-29
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Publication No.: US08011317B2Publication Date: 2011-09-06
- Inventor: Kurt H. Weiner , Tony P. Chiang , Aaron Francis , John Schmidt
- Applicant: Kurt H. Weiner , Tony P. Chiang , Aaron Francis , John Schmidt
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: B05C3/02
- IPC: B05C3/02 ; C23F1/00 ; H01L21/306
Abstract:
An integrated processing tool is described comprising a full-wafer processing module and a combinatorial processing module. Chemicals for use in the combinatorial processing module are fed from a delivery system including a set of first manifolds. An output of each first manifold is coupled to at least one mixing vessel. An output of each mixing vessel feeds more than one of a set of second manifolds. An output of each set of second manifolds feeds one of multiple site-isolated reactors of the combinatorial processing module.
Public/Granted literature
- US20080156769A1 Advanced mixing system for integrated tool having site-isolated reactors Public/Granted day:2008-07-03
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