Invention Grant
- Patent Title: Balanced purge slit valve
- Patent Title (中): 平衡吹扫狭缝阀
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Application No.: US12244643Application Date: 2008-10-02
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Publication No.: US08011381B2Publication Date: 2011-09-06
- Inventor: Jacob Newman , Douglas H. Burns
- Applicant: Jacob Newman , Douglas H. Burns
- Applicant Address: US CA Santa Clara
- Assignee: Applied Material, Inc.
- Current Assignee: Applied Material, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, L.L.P.
- Main IPC: B65D43/14
- IPC: B65D43/14 ; F16K27/00

Abstract:
Methods and apparatus for providing a gas to a slit valve opening are provided herein. In one embodiment, a slit valve is described. The slit valve includes a housing having an opening, the opening defined by a plurality of interior sidewalls and sized to allow a substrate to pass therethrough, a door adapted to selectively seal the opening, a gas inlet formed in the housing, and a plurality of nozzles disposed in or on at least one of the plurality of interior sidewalls, each of the plurality of nozzles in fluid communication with the gas inlet and the opening.
Public/Granted literature
- US20100084398A1 BALANCED PURGE SLIT VALVE Public/Granted day:2010-04-08
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