Invention Grant
- Patent Title: Structure of vacuum chuck for absorbing substrate
- Patent Title (中): 用于吸收衬底的真空吸盘的结构
-
Application No.: US10252722Application Date: 2002-09-24
-
Publication No.: US08011646B2Publication Date: 2011-09-06
- Inventor: Moon-Ho Choi
- Applicant: Moon-Ho Choi
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Birch, Stewart, Kolasch & Birch LLP
- Priority: KR2001-59086 20010924
- Main IPC: B25B11/00
- IPC: B25B11/00
Abstract:
A structure of a vacuum chuck for absorbing a substrate and usable in the fabrication of a liquid crystal display device is provided. This structure includes an absorbing plate absorbing a surface of the substrate, and a plurality of vacuum lines in an oblique line shape on the absorbing plate.
Public/Granted literature
- US20030075849A1 Structure of vacuum chuck for absorbing substrate Public/Granted day:2003-04-24
Information query
