Invention Grant
- Patent Title: Coating for gas bearing
- Patent Title (中): 气体轴承涂层
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Application No.: US12298547Application Date: 2007-04-19
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Publication No.: US08011880B2Publication Date: 2011-09-06
- Inventor: Roland Blumenthal , Michael Froitzheim
- Applicant: Roland Blumenthal , Michael Froitzheim
- Applicant Address: DE Cologne
- Assignee: Oerliken Leybold Vacuum GmbH
- Current Assignee: Oerliken Leybold Vacuum GmbH
- Current Assignee Address: DE Cologne
- Agency: Clements Bernard PLLC
- Agent Gregory N. Clements
- Priority: DE102006020102 20060429
- International Application: PCT/EP2007/053811 WO 20070419
- International Announcement: WO2007/125042 WO 20071108
- Main IPC: F04D29/056
- IPC: F04D29/056
Abstract:
The invention relates to a vacuum pump in which the gas bearing is coated with a hard layer, and to a process for preparing such gas bearing of a vacuum pump.
Public/Granted literature
- US20100202880A1 COATING FOR GAS BEARING Public/Granted day:2010-08-12
Information query
