Invention Grant
US08012000B2 Extended pad life for ECMP and barrier removal 失效
ECMP延长垫片寿命和屏障去除

Extended pad life for ECMP and barrier removal
Abstract:
A method and apparatus for extending a polishing article lifetime on a polishing tool with multiple platens is described. The apparatus includes an advanceable roll to roll platen with multiple embodiments of a polishing article to be used thereon. The polishing article is adapted to perform a polishing process by removing conductive and dielectric material from a substrate while minimizing downtime of the polishing tool. In some embodiments, the polishing article may be a dielectric material or a conductive material and is configured to include a longer usable lifetime to minimize replacement and downtime of the tool.
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