Invention Grant
- Patent Title: Extended pad life for ECMP and barrier removal
- Patent Title (中): ECMP延长垫片寿命和屏障去除
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Application No.: US11695484Application Date: 2007-04-02
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Publication No.: US08012000B2Publication Date: 2011-09-06
- Inventor: Yuchun Wang , Robert A. Ewald , Wei-Yung Hsu , Liang-Yuh Chen
- Applicant: Yuchun Wang , Robert A. Ewald , Wei-Yung Hsu , Liang-Yuh Chen
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, L.L.P.
- Main IPC: B24D11/02
- IPC: B24D11/02

Abstract:
A method and apparatus for extending a polishing article lifetime on a polishing tool with multiple platens is described. The apparatus includes an advanceable roll to roll platen with multiple embodiments of a polishing article to be used thereon. The polishing article is adapted to perform a polishing process by removing conductive and dielectric material from a substrate while minimizing downtime of the polishing tool. In some embodiments, the polishing article may be a dielectric material or a conductive material and is configured to include a longer usable lifetime to minimize replacement and downtime of the tool.
Public/Granted literature
- US20080242202A1 EXTENDED PAD LIFE FOR ECMP AND BARRIER REMOVAL Public/Granted day:2008-10-02
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