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US08012257B2 Methods for controllable doping of aluminum nitride bulk crystals 有权
氮化铝体晶的可控掺杂方法

Methods for controllable doping of aluminum nitride bulk crystals
Abstract:
Fabrication of doped and undoped stoichiometric polycrystalline AlN ceramics with high purity is accomplished by, for example, reacting Al pellets with nitrogen gas. Such polycrystalline AlN ceramics may be utilized in the fabrication of high purity AlN single crystals, which may be annealed to enhance a conductivity thereof.
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