Invention Grant
- Patent Title: Melt surface position monitoring apparatus in silicon single crystal growth process
- Patent Title (中): 熔体表面位置监测装置在硅单晶生长过程中
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Application No.: US11802792Application Date: 2007-05-25
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Publication No.: US08012258B2Publication Date: 2011-09-06
- Inventor: Hiroshi Hayakawa , Tokuji Maeda
- Applicant: Hiroshi Hayakawa , Tokuji Maeda
- Applicant Address: JP Tokyo
- Assignee: Sumco Corporation
- Current Assignee: Sumco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Clark & Brody
- Priority: JP2006-149890 20060530
- Main IPC: C30B15/00
- IPC: C30B15/00

Abstract:
The liquid surface position of the melt in the crucible in the silicon single crystal growth process utilizing the Czochralski method is monitored using the melt surface position on the occasion of seeding as a reference position and an estimated melt surface position can be calculated according to every situation, so that the distance between the melt and the thermal shield or water-cooling structure can be controlled with high precision. When the estimated melt surface position passes a preset upper limit and approaches the thermal shield, an alarm goes off and, further, when the melt comes into contact with the thermal shield or approaches the water-cooling structure, an alarm goes off if desired and, at the same time, the crucible is forcedly stopped from moving, so that a serious accident such as steam-incurred explosion resulting from the melt coming into contact with the water-cooling structure can be prevented. Accordingly, the apparatus can be widely applied as a melt surface position monitoring apparatus making it possible to safely operate any silicon single crystal growth apparatus utilizing the Czochralski method.
Public/Granted literature
- US20070277727A1 Melt surface position monitoring apparatus in silicon single crystal growth process Public/Granted day:2007-12-06
Information query
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