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US08012260B2 Apparatus and method for coating an areal substrate 有权
用于涂覆面状基材的装置和方法

Apparatus and method for coating an areal substrate
Abstract:
An apparatus for coating an areal substrate, for example a rectangular plate comprises a vaporizer source and a distributor system for the supply of vaporized material onto the substrate. The distributor system comprises a line source, with this line source and the substrate is movable relative to one another. The apparatus serves preferably for the production of flat screens with organic light-emitting diodes.
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