Invention Grant
- Patent Title: Apparatus and method for coating an areal substrate
- Patent Title (中): 用于涂覆面状基材的装置和方法
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Application No.: US10164337Application Date: 2002-06-06
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Publication No.: US08012260B2Publication Date: 2011-09-06
- Inventor: Uwe Hoffmann , Jutta Trube , Dieter Haas
- Applicant: Uwe Hoffmann , Jutta Trube , Dieter Haas
- Applicant Address: DE Alzenau
- Assignee: Applied Materials GmbH & Co. KG
- Current Assignee: Applied Materials GmbH & Co. KG
- Current Assignee Address: DE Alzenau
- Agency: Fish & Richardson P.C.
- Priority: DE10128091 20010611
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
An apparatus for coating an areal substrate, for example a rectangular plate comprises a vaporizer source and a distributor system for the supply of vaporized material onto the substrate. The distributor system comprises a line source, with this line source and the substrate is movable relative to one another. The apparatus serves preferably for the production of flat screens with organic light-emitting diodes.
Public/Granted literature
- US20020185069A1 Apparatus and method for coating an areal substrate Public/Granted day:2002-12-12
Information query
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