Invention Grant
- Patent Title: Plating method and plating apparatus
- Patent Title (中): 电镀方法和电镀装置
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Application No.: US12071679Application Date: 2008-02-25
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Publication No.: US08012330B2Publication Date: 2011-09-06
- Inventor: Takashi Kawakami , Tsutomu Nakada
- Applicant: Takashi Kawakami , Tsutomu Nakada
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2007-046187 20070226
- Main IPC: C25D5/00
- IPC: C25D5/00 ; C25D5/02 ; C25D7/12 ; C25D5/20 ; B23H11/00

Abstract:
A plating method, employing a face-down manner of plating and using a resistor body between a substrate and an anode, can securely bring an entire surface to be plated of the substrate into contact with a plating solution without permitting intrusion of air bubbles to the surface to be plated. A resistor body is disposed above the anode and immersed in the plating solution, allowing the plating solution to flow along an upper surface of the resistor body from the periphery toward the center of the resistor body. Thus, a raised portion of the plating solution is created in the center of the upper surface of the resistor body. The substrate is then lowered with the surface facing downwardly so as to fill the space between the surface to be plated of the substrate and the upper surface of the resistor body with the plating solution.
Public/Granted literature
- US20080210562A1 Plating method and plating apparatus Public/Granted day:2008-09-04
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