Invention Grant
US08012363B2 Metal film protection during printhead fabrication with minimum number of MEMS processing steps
有权
打印头制造过程中的金属膜保护,具有最少数量的MEMS加工步骤
- Patent Title: Metal film protection during printhead fabrication with minimum number of MEMS processing steps
- Patent Title (中): 打印头制造过程中的金属膜保护,具有最少数量的MEMS加工步骤
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Application No.: US11946840Application Date: 2007-11-29
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Publication No.: US08012363B2Publication Date: 2011-09-06
- Inventor: Gregory John McAvoy , Emma Rose Kerr , Kia Silverbrook
- Applicant: Gregory John McAvoy , Emma Rose Kerr , Kia Silverbrook
- Applicant Address: AU Balmain, New South Wales
- Assignee: Silverbrook Research Pty Ltd
- Current Assignee: Silverbrook Research Pty Ltd
- Current Assignee Address: AU Balmain, New South Wales
- Main IPC: G01D15/00
- IPC: G01D15/00

Abstract:
A method of fabricating a printhead having a hydrophobic ink ejection face, the method comprising the steps of: (a) providing a partially-fabricated printhead comprising a plurality of nozzle chambers and a nozzle plate having relatively hydrophilic nozzle surface, the nozzle surface at least partially defining the ink ejection face of the printhead; (b) depositing a hydrophobic polymeric layer onto the nozzle surface; (c) depositing a protective metal film onto at least the polymeric layer; (d) depositing a sacrificial material onto the polymeric layer; (e) patterning the sacrificial material to define a plurality of nozzle opening regions; (f) defining a plurality of nozzle openings through the metal film, the polymeric layer and the nozzle plate; (g) subjecting the printhead to an oxidizing plasma; and (h) removing the protective metal film, thereby providing a printhead having a relatively hydrophobic ink ejection face.
Public/Granted literature
- US20090139961A1 METAL FILM PROTECTION DURING PRINTHEAD FABRICATION WITH MINIMUM NUMBER OF MEMS PROCESSING STEPS Public/Granted day:2009-06-04
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