Invention Grant
- Patent Title: Diamond like carbon coating of substrate housings
- Patent Title (中): 钻石像碳涂层的基板外壳
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Application No.: US12515606Application Date: 2007-06-14
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Publication No.: US08012586B2Publication Date: 2011-09-06
- Inventor: Charles W. Extrand , Sung In Moon
- Applicant: Charles W. Extrand , Sung In Moon
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- International Application: PCT/US2007/013909 WO 20070614
- International Announcement: WO2008/063241 WO 20080529
- Main IPC: B09B3/00
- IPC: B09B3/00 ; H01L23/58

Abstract:
Embodiments of the invention include articles comprising a diamond like carbon coating or doped diamond like carbon coating on one or more surfaces of a plastic substrate or a plastic enclosure. Embodiments of the DLC or doped DLC coatings reduce the gas permeation of the coated plastic or thermoplastic to hydrogen or helium compared to the permeability of the plastic alone. The DLC or doped DLC coatings coating provides a surface resistivity of from about 107 to about 1014 ohm/square and have a transmittance that range from about 0% to about 70% less than the transmittance of the underlying plastic substrate in the range of about 300 nm to about 1100 nm. The DLC coated plastic can be used in environmental enclosures for protecting environmentally sensitive substrates such as semiconductor wafers and reticles.
Public/Granted literature
- US20100017346A1 DIAMOND LIKE CARBON COATING OF SUBSTRATE HOUSINGS Public/Granted day:2010-01-21
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