Invention Grant
US08012665B2 Positive photosensitive composition and pattern forming method using the same 有权
正光敏组合物和使用其的图案形成方法

Positive photosensitive composition and pattern forming method using the same
Abstract:
A positive photosensitive composition comprising: (A) a compound capable of generating an acid upon irradiation with actinic rays or radiation; (B1) a resin of which solubility in an alkali developer increases under an action of an acid; and (B2) a resin that has at least one group selected from (a) an alkali-soluble group and (b) a group capable of decomposing under an action of an alkali to produce an alkali-soluble group, and the resin (B2) does not have a group capable of decomposing under an action of an acid; and a pattern forming method using the same.
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