Invention Grant
- Patent Title: Positive photosensitive composition and pattern forming method using the same
- Patent Title (中): 正光敏组合物和使用其的图案形成方法
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Application No.: US11475128Application Date: 2006-06-27
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Publication No.: US08012665B2Publication Date: 2011-09-06
- Inventor: Kunihiko Kodama , Fumiyuki Nishiyama
- Applicant: Kunihiko Kodama , Fumiyuki Nishiyama
- Applicant Address: JP Tokyo
- Assignee: Fujifilm Corporation
- Current Assignee: Fujifilm Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JPP2005-188215 20050628
- Main IPC: G03C1/00
- IPC: G03C1/00 ; G03F1/00

Abstract:
A positive photosensitive composition comprising: (A) a compound capable of generating an acid upon irradiation with actinic rays or radiation; (B1) a resin of which solubility in an alkali developer increases under an action of an acid; and (B2) a resin that has at least one group selected from (a) an alkali-soluble group and (b) a group capable of decomposing under an action of an alkali to produce an alkali-soluble group, and the resin (B2) does not have a group capable of decomposing under an action of an acid; and a pattern forming method using the same.
Public/Granted literature
- US20060292490A1 Positive photosensitive composition and pattern forming method using the same Public/Granted day:2006-12-28
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