A soft mold may be manufactured that is used for forming a pattern. Semiconductor devices and flat panel display devices include a plurality of fine patterns on a substrate. The soft mold may be photo-curable and formed of a material with a hydrophobic property similar to heat-curable molds. The photo-curable mold may be created on a master plate with a resin layer that is removed with a back plate and adhesive layer after embossed or depressed portions are formed on the mold that correspond with embossed or depressed portions of the master plate.