Invention Grant
- Patent Title: Resist composition and method of forming resist pattern
- Patent Title (中): 抗蚀剂图案的抗蚀剂组成和方法
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Application No.: US12400203Application Date: 2009-03-09
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Publication No.: US08012669B2Publication Date: 2011-09-06
- Inventor: Hiroaki Shimizu , Yasuhiro Yoshii , Yoshiyuki Utumi , Hideo Hada
- Applicant: Hiroaki Shimizu , Yasuhiro Yoshii , Yoshiyuki Utumi , Hideo Hada
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: JP2008-060065 20080310; JP2009-046064 20090227
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004

Abstract:
A resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the acid-generator component (B) including an acid generator (B1) consisting of a compound represented by general formula (b1) shown below (wherein Q1 represents a divalent linkage group containing an oxygen atom; Y1 represents a fluorinated alkylene group of 1 to 4 carbon atoms which may have a substituent, with the proviso that the carbon atom adjacent to the sulfur atom within the —SO3− group has a fluorine atom bonded thereto; X represents a hydrocarbon group of 3 to 30 carbon atoms which may have a substituent; and A+ represents an organic cation), and the resist composition further including an organic compound (C) which generates an acid exhibiting a weaker acid strength than the acid generated from the acid generator (B1) upon exposure. [Chemical Formula 1] X-Q1-Y1—SO3+A+ (b1)
Public/Granted literature
- US20090226842A1 RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN Public/Granted day:2009-09-10
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