Invention Grant
- Patent Title: Semiconductor embedded resistor generation
- Patent Title (中): 半导体嵌入式电阻器生成
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Application No.: US12364764Application Date: 2009-02-03
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Publication No.: US08012821B2Publication Date: 2011-09-06
- Inventor: Choongryul Ryou , Seunghwan Lee , Jun Yuan , Victor Chan , Manfred Eller , Nam Sung Kim , Narasimhulu Kanike , Srikanth Balaji Samavedam
- Applicant: Choongryul Ryou , Seunghwan Lee , Jun Yuan , Victor Chan , Manfred Eller , Nam Sung Kim , Narasimhulu Kanike , Srikanth Balaji Samavedam
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: F. Chau & Associates, LLC
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
Generating an embedded resistor in a semiconductor device includes forming a shallow trench isolation (STI) region in a substrate; forming a pad oxide on the STI region and substrate; depositing a silicon layer on the pad oxide; forming a photo-resist mask on a portion of the silicon layer disposed above the STI region; etching the silicon layer to yield a polyconductor above the STI region; oxidizing the polyconductor; depositing an oxide material or a metal gate material on the oxidized surface; depositing a silicon layer on the oxide material or metal gate material; depositing additional silicon on a portion of the silicon layer above the STI region; patterning a transistor gate with a photo-resist mask on another portion of the silicon layer away from the STI region; and etching the silicon layer to yield a transistor structure away from the STI region and a resistor structure above the STI region.
Public/Granted literature
- US20100197106A1 SEMICONDUCTOR EMBEDDED RESISTOR GENERATION Public/Granted day:2010-08-05
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